After a bit of fuddling I’ve gotten some inductively coupled plasmas started. These pictures are each around 1E-1 torr. The two coils are 0.5uF and 5uF respectively. They are driven with a signal generator (@13.56 or 27.12MHz)->100W shortwave amplifier->MFJ 941B tuner->BNC aligator clips. The plasmas were started with ~500V 20kHz AC on different feedthroughs.
Tuning was difficult but was made easier by monitoring radiated power with a SDR. It helped to add a 220pF capacitor in series to move the impedance closer to something that a tuner would normally be used for. A 275pF capacitor would have yielded a resonant circuit at 13.56MHz and 5uF but the real part of the impedance would still have been mismatched. Using the balun tuner output failed, presumably because the 1:9 turns ratio moved the impedance further out of range. I also tried using a homewrapped ~10:1 inductor around a ferrite core (because the real impedance here is tiny compared to 50 ohms) and got some less impressive plasmas.